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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77Rinsing and Drying Effects on Heterogeneous...

Rinsing and Drying Effects on Heterogeneous Substrates

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

195-198

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.195

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Online since:

January 2001

Authors:

Wim Fyen, Rita Vos, K. Devriendt, Marc Meuris, Paul W. Mertens, Marc Heyns

Keywords:

Drying, Heterogeneous Substrate, Post CMP Cleaning, Rinsing

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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