Determination of Photoresist Degradation Products in O3/DI Processing

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Periodical:

Solid State Phenomena (Volumes 76-77)

Edited by:

Marc Heyns, Marc Meuris and Paul Mertens

Pages:

207-210

DOI:

10.4028/www.scientific.net/SSP.76-77.207

Citation:

H. Vankerckhoven et al., "Determination of Photoresist Degradation Products in O3/DI Processing", Solid State Phenomena, Vols. 76-77, pp. 207-210, 2001

Online since:

January 2001

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$35.00

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