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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77Determination of Photoresist Degradation Products...

Determination of Photoresist Degradation Products in O₃/DI Processing

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

207-210

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.207

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Online since:

January 2001

Authors:

H. Vankerckhoven, F. De Smedt, B. Van Herp, Martine Claes, Stefan De Gendt, Marc Heyns, Chris Vinckier

Keywords:

Carboxylic Acid, Ion Chromatography, Ozone, Photoresist, Semiconductor Cleaning

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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