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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77Low Consumption Front End of the Line Cleaning:...

Low Consumption Front End of the Line Cleaning: LC-FEOL

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Ultra Clean Processing of Silicon Surfaces V

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

199-202

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.199

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Cite this paper

Online since:

January 2001

Authors:

Pascal Besson, C. Cowache, J.M. Fabbri, F. Tardif, Alessio Beverina

Keywords:

Cleaning, Megasonics, Silicon Consumption

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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