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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77A Novel Rinsing Tank Concept to Save DI Water...

A Novel Rinsing Tank Concept to Save DI Water Using an Internal Recirculation Flow: 'Circle Stream Rinser'

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Ultra Clean Processing of Silicon Surfaces V

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

191-194

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.191

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Online since:

January 2001

Authors:

F. Tardif, F. de Bourmont, T. Vareine, V. Oravec, A. Di Martino

Keywords:

Cost Reduction, Environment, Rinsing, Simulation

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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