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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77Characterization and Production Metrology of Thin...

Characterization and Production Metrology of Thin Transistor Gate Dielectric Films

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Ultra Clean Processing of Silicon Surfaces V

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

177-180

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.177

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Cite this paper

Online since:

January 2001

Authors:

William Chism, Alain C. Diebold, Jesse Canterbury, Curt Richter

Keywords:

Dispersion Models, Ellipsometry, Gate Dielectrics

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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