Characterization of DI Water/O3 Oxidation of Si (100) and Si (111) Surfaces by OCP Measurements

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Periodical:

Solid State Phenomena (Volumes 76-77)

Edited by:

Marc Heyns, Marc Meuris and Paul Mertens

Pages:

161-164

DOI:

10.4028/www.scientific.net/SSP.76-77.161

Citation:

H. Okorn-Schmidt et al., "Characterization of DI Water/O3 Oxidation of Si (100) and Si (111) Surfaces by OCP Measurements", Solid State Phenomena, Vols. 76-77, pp. 161-164, 2001

Online since:

January 2001

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