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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77The Evolution of Chemical Oxides Into Ultrathin...

The Evolution of Chemical Oxides Into Ultrathin Oxides: A Spectroscopic Characterization

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

145-148

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.145

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Online since:

January 2001

Authors:

J. Eng, R.L. Opila, J.M. Rosamilia, B.J. Sapjeta, Y.J. Chabal, T. Boone, R. Masaitis, Thomas Sorsch, Martin L. Green

Keywords:

Spectroscopy, Ultrathin Silicon Oxides, Wet Chemical Oxides

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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