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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77The Origins of Fluorine in Dry Ultrathin Silicon...

The Origins of Fluorine in Dry Ultrathin Silicon Oxides

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

153-156

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.153

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Online since:

January 2001

Authors:

Guy Vereecke, Erika Röhr, R.J. Carter, Thierry Conard, H. De Witte, Marc Heyns

Keywords:

Fluorine Contamination, Subsurface Fluorine, Ultrathin Silicon Oxides

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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