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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77A Controlled Deposition of Organic Contamination...

A Controlled Deposition of Organic Contamination and the Removal with Ozone Based Cleanings

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Abstract:

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Ultra Clean Processing of Silicon Surfaces V

Info:

Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

223-226

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.223

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Cite this paper

Online since:

January 2001

Authors:

Martine Claes, Stefan De Gendt, C. Kenens, Thierry Conard, H. Bender, W. Storm, T. Bauer, Sebastien Lagrange, Paul W. Mertens, Marc Heyns

Keywords:

MIR-FTIR, Organic Contamination, Ozone Cleaning, ToF-SIMS

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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