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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77Particle Removal Mechanism of Hydrogenated...

Particle Removal Mechanism of Hydrogenated Ultrapure Water with Megasonic Irradiation

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Ultra Clean Processing of Silicon Surfaces V

Info:

Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

245-250

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.245

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Online since:

January 2001

Authors:

Hiroshi Morita, Jun ichi Ida, Osamu Ota, Kazumi Tsukamoto, Tadahiro Ohmi

Keywords:

Hydrogenated Ultrapure Water (H₂-UPW), Particle Removal Mechanism, Surplus Radical Model

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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