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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77Use of Surfactants for Improved Particle...

Use of Surfactants for Improved Particle Performance of dHF-Based Cleaning Recipes

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

263-266

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.263

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Online since:

January 2001

Authors:

Rita Vos, Kai Dong Xu, Marcel Lux, Wim Fyen, R. Singh, Zhe Fei Chen, Paul W. Mertens, Z. Hatcher, Marc Heyns

Keywords:

Hydrophobic Interactions, Particle Removal Efficiency, Surface Charge

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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