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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77Pattern Dependent Corrosion Effects in HF Based...

Pattern Dependent Corrosion Effects in HF Based Post Cu CMP Cleanings

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Abstract:

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

275-278

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.275

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Online since:

January 2001

Authors:

Wim Fyen, I. Teerlinck, Sebastien Lagrange, S.H. Brongersma, A. Steegen, Paul W. Mertens, Marc Heyns

Keywords:

CMP Cleaning, Corrosion, HF, Post Cu

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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