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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77Effect of Surface Charge and Fluid Properties on...

Effect of Surface Charge and Fluid Properties on Particle Removal Characteristics of a Surface-Optimized REB Filter

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Abstract:

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Ultra Clean Processing of Silicon Surfaces V

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

271-274

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.271

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Online since:

January 2001

Authors:

Wayne P. Kelly, Donald C. Grant, Joseph Zahka, Wayne Huang, Srini Raghavan

Keywords:

Filter, Retention, Zeta-Potential

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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