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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77Effect of Copper on the Breakthrough Voltage of...

Effect of Copper on the Breakthrough Voltage of Poly-Si - Poly-Si Capacitors

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Abstract:

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Ultra Clean Processing of Silicon Surfaces V

Info:

Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

279-282

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.279

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Cite this paper

Online since:

January 2001

Authors:

M. Boehringer, J.E. Pillion, V. Erdmann, M. Rygula, K. Winz, P. Brauchle, D. Aquino, H. Zhang, Joseph Zahka, G. Zielonka, J. Hauber

Keywords:

Copper (Cu), Hydrofluoric Acid (HF), Poly-Silicon

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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