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HomeSolid State PhenomenaSolid State Phenomena Vols. 76-77New Insights into Particle Adhesion

New Insights into Particle Adhesion

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Ultra Clean Processing of Silicon Surfaces V

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Periodical:

Solid State Phenomena (Volumes 76-77)

Pages:

283-290

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.76-77.283

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Online since:

January 2001

Authors:

Sean Eichenlaub, Kevin Cooper, Anand Gupta, Stephen Beaudoin

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© 2001 Trans Tech Publications Ltd. All Rights Reserved

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