Stress-Induced Redistribution of Point Defects in Silicon Device Structures

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Periodical:

Solid State Phenomena (Volumes 82-84)

Edited by:

V. Raineri, F. Priolo, M. Kittler and H. Richter

Pages:

225-230

DOI:

10.4028/www.scientific.net/SSP.82-84.225

Citation:

K.V. Loiko et al., "Stress-Induced Redistribution of Point Defects in Silicon Device Structures", Solid State Phenomena, Vols. 82-84, pp. 225-230, 2002

Online since:

November 2001

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$35.00

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