Paper Titles

Incorporation, Diffusion and Agglomeration of Carbon in Silicon
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Suppression of Boron Transient Enhanced Diffusion by C Trapping
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Thermal Evolution of Extrinsic Defects in Ion Implanted Silicon: Current Understanding and Modelling
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Room Temperature Point Defect Migration in Crystalline Si
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Electrical Effects of Point Defect Clouds at Dislocations in Silicon, Studied by Deep Level Transient Spectroscopy
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The Effect of Intrinsic Point Defects upon Dislocation Motion in Silicon
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Stress-Induced Redistribution of Point Defects in Silicon Device Structures
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Characterization of Interstitial-Related Bulk Defects in p^- Silicon Substrates by Epitaxial Deposition
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Monitoring of Defects in Thermal Oxides during Electrical Stress
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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Electrical Effects of Point Defect Clouds at...

Electrical Effects of Point Defect Clouds at Dislocations in Silicon, Studied by Deep Level Transient Spectroscopy

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Gettering and Defect Engineering in Semiconductor Technology IX

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

213-218

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.213

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Online since:

November 2001

Authors:

Wolfgang Schröter, Vitaly V. Kveder, Henrik Hedemann

Keywords:

Dislocation, DLTS, Electrical Properties, Point Defect Clouds, Silicon

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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