Thermal Evolution of Extrinsic Defects in Ion Implanted Silicon: Current Understanding and Modelling

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Periodical:

Solid State Phenomena (Volumes 82-84)

Edited by:

V. Raineri, F. Priolo, M. Kittler and H. Richter

Pages:

201-206

DOI:

10.4028/www.scientific.net/SSP.82-84.201

Citation:

F. Cristiano et al., "Thermal Evolution of Extrinsic Defects in Ion Implanted Silicon: Current Understanding and Modelling", Solid State Phenomena, Vols. 82-84, pp. 201-206, 2002

Online since:

November 2001

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$35.00

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