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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Characterization of Interstitial-Related Bulk...

Characterization of Interstitial-Related Bulk Defects in p^- Silicon Substrates by Epitaxial Deposition

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Gettering and Defect Engineering in Semiconductor Technology IX

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

231-236

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.231

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Online since:

November 2001

Authors:

R. Schmolke, W. Angelberger, Wilfried von Ammon, H. Bender

Keywords:

A-Swirl, Epitaxial Deposition, I-Pit, Secco Etch, Silicon Self-Interstitial, TEM

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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