Infrared Absorption Analysis of Nitrogen in Czochralski Silicon

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Periodical:

Solid State Phenomena (Volumes 82-84)

Edited by:

V. Raineri, F. Priolo, M. Kittler and H. Richter

Pages:

63-68

DOI:

10.4028/www.scientific.net/SSP.82-84.63

Citation:

Y. Yamanaka et al., "Infrared Absorption Analysis of Nitrogen in Czochralski Silicon", Solid State Phenomena, Vols. 82-84, pp. 63-68, 2002

Online since:

November 2001

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$35.00

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