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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Role of Nitrogen-Related Complexes in the...

Role of Nitrogen-Related Complexes in the Formation of Defects in N-Cz Silicon Wafers

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Gettering and Defect Engineering in Semiconductor Technology IX

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

69-74

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.69

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Online since:

November 2001

Authors:

A. Karoui, F.S. Karoui, De Ren Yang, George A. Rozgonyi

Keywords:

Cluster, Complex, Denuded Zones, Etching, FT-IR, Interstitial, Lo-Hi, Nitrogen, Nomarski, Nucleation, OPP, Oxide, Oxygen, Oxynitride, Precipitation, Silicon, SIMS, Size Distribution, TEM, Vacancy, VN₂, Void

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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