Role of Nitrogen-Related Complexes in the Formation of Defects in N-Cz Silicon Wafers

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Periodical:

Solid State Phenomena (Volumes 82-84)

Edited by:

V. Raineri, F. Priolo, M. Kittler and H. Richter

Pages:

69-74

DOI:

10.4028/www.scientific.net/SSP.82-84.69

Citation:

A. Karoui et al., "Role of Nitrogen-Related Complexes in the Formation of Defects in N-Cz Silicon Wafers", Solid State Phenomena, Vols. 82-84, pp. 69-74, 2002

Online since:

November 2001

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$35.00

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