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Modeling of Impurity Transport and Point Defect Formation during Cz Si Crystal Growth
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Effect of Heavy Carbon, Nitrogen and Boron Doping on Oxygen Precipitation Behavior in Silicon Epitaxial Wafers
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Carbon-Oxygen-Related Complexes in Irradiated and Heat-Treated Silicon: IR Absorption Studies
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Infrared Absorption Analysis of Nitrogen in Czochralski Silicon
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Role of Nitrogen-Related Complexes in the Formation of Defects in N-Cz Silicon Wafers
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Optical Properties of Oxygen Agglomerates in Silicon
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HomeSolid State PhenomenaSolid State Phenomena Vols. 82-84Carbon-Oxygen-Related Complexes in Irradiated and...

Carbon-Oxygen-Related Complexes in Irradiated and Heat-Treated Silicon: IR Absorption Studies

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Gettering and Defect Engineering in Semiconductor Technology IX

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Periodical:

Solid State Phenomena (Volumes 82-84)

Pages:

57-62

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.82-84.57

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Online since:

November 2001

Authors:

L.I. Murin, V.P. Markevich, J. Lennart Lindström, Mats Kleverman, J. Hermansson, T. Hallberg, Bengt Gunnar Svensson

Keywords:

Carbon, Complex, Local Vibrational Modes, Oxygen, Silicon

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© 2002 Trans Tech Publications Ltd. All Rights Reserved

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