Thermal Evolution of (100) Silicon and Chemical Oxides as Seen by ATR Spectroscopy

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Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

183-186

DOI:

10.4028/www.scientific.net/SSP.92.183

Citation:

F. Tardif et al., "Thermal Evolution of (100) Silicon and Chemical Oxides as Seen by ATR Spectroscopy", Solid State Phenomena, Vol. 92, pp. 183-186, 2003

Online since:

May 2003

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$35.00

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