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HomeSolid State PhenomenaSolid State Phenomena Vol. 92Thermal Evolution of (100) Silicon and Chemical...

Thermal Evolution of (100) Silicon and Chemical Oxides as Seen by ATR Spectroscopy

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Ultra Clean Processing of Silicon Surfaces VI

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Periodical:

Solid State Phenomena (Volume 92)

Pages:

183-186

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.92.183

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Online since:

May 2003

Authors:

F. Tardif, A. Chabli, Adrien Danel, Névine Rochat, Marc Veillerot

Keywords:

ATR, Infra Red, Thermal Oxide, Wet Oxide

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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