TXRF Analysis of Low Z Elements and TXRF-NEXAFS Speciation of Organic Contaminants on Silicon Wafer Surfaces Excited by Monochromatized Undulator Radiation

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Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

165-170

DOI:

10.4028/www.scientific.net/SSP.92.165

Citation:

B. Beckhoff et al., "TXRF Analysis of Low Z Elements and TXRF-NEXAFS Speciation of Organic Contaminants on Silicon Wafer Surfaces Excited by Monochromatized Undulator Radiation", Solid State Phenomena, Vol. 92, pp. 165-170, 2003

Online since:

May 2003

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$35.00

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