A Theoretical and Experimental Study of Damage-Free BEOL Cleaning with Megasonic Agitation

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Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

151-156

DOI:

10.4028/www.scientific.net/SSP.92.151

Citation:

J. M. Lauerhaas et al., "A Theoretical and Experimental Study of Damage-Free BEOL Cleaning with Megasonic Agitation", Solid State Phenomena, Vol. 92, pp. 151-156, 2003

Online since:

May 2003

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$35.00

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