Influence of Hardware and Chemistry on the Removal of Nano-Particles in a Megasonic Cleaning Tank

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Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

143-146

DOI:

10.4028/www.scientific.net/SSP.92.143

Citation:

G. Vereecke et al., "Influence of Hardware and Chemistry on the Removal of Nano-Particles in a Megasonic Cleaning Tank", Solid State Phenomena, Vol. 92, pp. 143-146, 2003

Online since:

May 2003

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$35.00

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