Influence of Frequency on the Removal Efficiency of Nano-Particles in a Megasonic Spray Cleaning Tool

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Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

147-150

DOI:

10.4028/www.scientific.net/SSP.92.147

Citation:

M. Schmidt et al., "Influence of Frequency on the Removal Efficiency of Nano-Particles in a Megasonic Spray Cleaning Tool", Solid State Phenomena, Vol. 92, pp. 147-150, 2003

Online since:

May 2003

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$35.00

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