Investigation of Particle Removal from Silicon Surfaces by Means of Dry and Steam Laser Cleaning

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Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

133-134

DOI:

10.4028/www.scientific.net/SSP.92.133

Citation:

P. Leiderer et al., "Investigation of Particle Removal from Silicon Surfaces by Means of Dry and Steam Laser Cleaning", Solid State Phenomena, Vol. 92, pp. 133-134, 2003

Online since:

May 2003

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$35.00

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