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Backside Cleaning for Copper Removal
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Evaluation of Organic Contamination on Si Wafers in Fab Environments
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Investigation of Particle Removal from Silicon Surfaces by Means of Dry and Steam Laser Cleaning
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HomeSolid State PhenomenaSolid State Phenomena Vol. 92Evaluation of Organic Contamination on Si Wafers...

Evaluation of Organic Contamination on Si Wafers in Fab Environments

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Ultra Clean Processing of Silicon Surfaces VI

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Periodical:

Solid State Phenomena (Volume 92)

Pages:

125-128

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.92.125

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Online since:

May 2003

Authors:

Joong S. Jeon, Colman Wong, Susanne Ohsiek, Hyeon S. Kim, Bob Ogle

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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