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HomeSolid State PhenomenaSolid State Phenomena Vol. 92Formation of Time-Dependent Haze on Silicon Wafers

Formation of Time-Dependent Haze on Silicon Wafers

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Periodical:

Solid State Phenomena (Volume 92)

Pages:

109-112

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.92.109

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Online since:

May 2003

Authors:

N. Münter, Bernd O. Kolbesen, W. Storm, Timo Müller

Keywords:

Copper (Cu), Localized Light Scatters, Time-Dependent Haze

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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