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HomeSolid State PhenomenaSolid State Phenomena Vol. 92Evaluation of Ultratrace Metallic Elements in...

Evaluation of Ultratrace Metallic Elements in Poly-SiGe Thin Films

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Ultra Clean Processing of Silicon Surfaces VI

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Periodical:

Solid State Phenomena (Volume 92)

Pages:

97-100

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.92.97

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Online since:

May 2003

Authors:

Yuji Yamada, Shoji Kozuka, Ayako Shimazaki, Miyuki Takenaka

Keywords:

ICP-MS, Metallic Impurity, Poly-SiGe Film

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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