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HomeSolid State PhenomenaSolid State Phenomena Vol. 92Compatibility of Supercritical Co2-Based Stripping...

Compatibility of Supercritical Co₂-Based Stripping with Porous Ultra Low-k Materials and Copper

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Ultra Clean Processing of Silicon Surfaces VI

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Periodical:

Solid State Phenomena (Volume 92)

Pages:

113-116

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.92.113

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Online since:

May 2003

Authors:

C. Millet, Adrien Danel, M. Ndour, F. Tardif

Keywords:

Stripping, Supercritical CO₂, Ultra Low-k

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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