Compatibility of Supercritical Co2-Based Stripping with Porous Ultra Low-k Materials and Copper

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Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

113-116

DOI:

10.4028/www.scientific.net/SSP.92.113

Citation:

C. Millet et al., "Compatibility of Supercritical Co2-Based Stripping with Porous Ultra Low-k Materials and Copper", Solid State Phenomena, Vol. 92, pp. 113-116, 2003

Online since:

May 2003

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$35.00

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