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HomeSolid State PhenomenaSolid State Phenomena Vol. 92BEOL Post Ash Residue Removal Using DSP* Chemistry...

BEOL Post Ash Residue Removal Using DSP* Chemistry in an FSI Batch Spray Tool

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Ultra Clean Processing of Silicon Surfaces VI

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Periodical:

Solid State Phenomena (Volume 92)

Pages:

117-120

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.92.117

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Online since:

May 2003

Authors:

René Vroom, Georg Gogg, Jerry O'Dwyer

Keywords:

Dilute Sulfuric Peroxide DSP, ''Pious'' Ring, Polymer Removal

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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