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HomeSolid State PhenomenaSolid State Phenomena Vol. 92Organic Contamination: Purge Gas Impact in Plastic...

Organic Contamination: Purge Gas Impact in Plastic Storage Boxes

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Ultra Clean Processing of Silicon Surfaces VI

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Periodical:

Solid State Phenomena (Volume 92)

Pages:

105-108

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.92.105

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Online since:

May 2003

Authors:

Marc Veillerot, Adrien Danel, S. Marthon, F. Tardif

Keywords:

Airbourne Molecular Contamination, Electrical Performances, Gate Oxide

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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