Effect of Additives on the Removal Efficiency of Photoresist by Ozone/DI-Water Processes: Experimental Study

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

101-104

DOI:

10.4028/www.scientific.net/SSP.92.101

Citation:

H. Vankerckhoven et al., "Effect of Additives on the Removal Efficiency of Photoresist by Ozone/DI-Water Processes: Experimental Study", Solid State Phenomena, Vol. 92, pp. 101-104, 2003

Online since:

May 2003

Export:

Price:

$35.00

In order to see related information, you need to Login.