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HomeSolid State PhenomenaSolid State Phenomena Vol. 92Effect of Transient pH on Particle Deposition...

Effect of Transient pH on Particle Deposition during Immersion Rinsing

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Ultra Clean Processing of Silicon Surfaces VI

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Periodical:

Solid State Phenomena (Volume 92)

Pages:

139-142

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.92.139

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Online since:

May 2003

Authors:

Wim Fyen, Kai Dong Xu, Rita Vos, Guy Vereecke, Paul W. Mertens, Marc Heyns

Keywords:

Diffusion, Particle Deposition, pH Shock, Rinsing

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© 2003 Trans Tech Publications Ltd. All Rights Reserved

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