Forced Vapour-Phase Decomposition (FVPD) in Combination with e.g. TXRF - a Method to Determine Contamination in Silicon

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Periodical:

Solid State Phenomena (Volume 92)

Edited by:

Marc Heyns, Paul Mertens and Marc Meuris

Pages:

171-174

DOI:

10.4028/www.scientific.net/SSP.92.171

Citation:

I. Rink "Forced Vapour-Phase Decomposition (FVPD) in Combination with e.g. TXRF - a Method to Determine Contamination in Silicon", Solid State Phenomena, Vol. 92, pp. 171-174, 2003

Online since:

May 2003

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