Preface
Smart-Cut Process for Ultrathin SOI Wafers Manufacturing
p.1
p.1
Investigation of Crystal Defects in Epitaxial Layers on Nitrogen-Doped Substrates and a Method for their Suppression
p.11
p.11
Defect Formation in Heavily As-Doped Cz Si
p.17
p.17
Recrystallization of Silicon on Insulator Layers Implanted with High Doses of Hydrogen Ions
p.23
p.23
Laser Crystallization of Thin a-Si Films on Plastic Substrates Using Excimer Laser Treatments
p.29
p.29
Predicting Material Parameters for Intrinsic Point Defect Diffusion in Silicon Crystal Growth
p.35
p.35
Dislocation Locking in Silicon by Oxygen and Oxygen Transport at Low Temperatures
p.43
p.43
Effect of Electron Irradiation on Thermal Donors in Oxygen-Doped High-Resistivity FZ Si
p.53
p.53
Preface
Abstract:
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Info:
Periodical:
Solid State Phenomena (Volumes 95-96)
Online since:
September 2003
Сopyright:
© 2004 Trans Tech Publications Ltd. All Rights Reserved
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