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HomeSolid State PhenomenaSolid State Phenomena Vols. 95-96Defect Formation in Heavily As-Doped Cz Si

Defect Formation in Heavily As-Doped Cz Si

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Periodical:

Solid State Phenomena (Volumes 95-96)

Pages:

17-22

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.95-96.17

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Online since:

September 2003

Authors:

S. Rouvimov, R. Kuytt, J. Kearns, V. Todt, B. Orschel, H. Siriwardane, A. Buczkowski, I. Shul'pina, George A. Rozgonyi

Keywords:

Arsenic Clustering, Cz As-Doped Silicon, Defect generation, Photoluminescence (PL), X-Ray Diffraction (XRD), XRT

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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