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HomeSolid State PhenomenaSolid State Phenomena Vols. 95-96Luminescence of Silicon Implanted with Phosphorus

Luminescence of Silicon Implanted with Phosphorus

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Periodical:

Solid State Phenomena (Volumes 95-96)

Pages:

289-296

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.95-96.289

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Online since:

September 2003

Authors:

Tzanimir Arguirov, Martin Kittler, Winfried Seifert, D. Bolze, K.-E. Ehwald, Peter Formanek, Jürgen Reif

Keywords:

Crystal Defects, Phosphorus Implantation, Photoluminescence (PL), Silicon

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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