Effect of External Stress at Annealing on Microstructure of Silicon Co-Implanted with Hydrogen and Helium

Article Preview

Abstract:

You might also be interested in these eBooks

Info:

Periodical:

Solid State Phenomena (Volumes 95-96)

Pages:

313-318

Citation:

Online since:

September 2003

Export:

Price:

Permissions CCC:

Permissions PLS:

Сopyright:

© 2004 Trans Tech Publications Ltd. All Rights Reserved

Share:

Citation:

[1] A.G. Ulyashin, R. Job, W.R. Fahrner, A.V. Mudryi, A.I. Patuk, I.A. Shakin: Mater. Sci. Semicond. Processing Vol. 4 (2001), p.297.

DOI: 10.1016/s1369-8001(00)00115-3

Google Scholar

[2] M.K. Weldon, M. Collot, Y. J. Chabal, V.C. Venezia, a. Agarwal, T.E. Haynes, D.J. Eaglesham, S.B. Christman and E.E. Chaban: Appl. Phys. Lett. Vol. 73 (1998), p.3721.

DOI: 10.1063/1.122875

Google Scholar

[3] A. Misiuk, J. Bak-Misiuk, M. Kaniewska, K.S. Zhuravlev, V. Raineri and I.V. Antonova: Mater. Phys. Mech. Vol. 5 (2002), p.31.

Google Scholar

[4] A. Misiuk, J. Bak-Misiuk, I.V. Antonova, V. Raineri, A. Romano-Rodriguez, A. Bachrouri, H.B. Surma, J. Ratajczak, J. Katcki, J. Adamczewska, E.P. Neustroev: Comput. Mater. Sci. Vol. 21 (2001), p.515.

DOI: 10.1016/s0927-0256(01)00200-2

Google Scholar

[5] A. Misiuk, A. Barcz, V. Raineri, J. Ratajczak, J. Bak-Misiuk, I.V. Antonova, W. Wierzchowski, K. Wieteska: Physica B Vol. 308-310 (2001), p.317.

DOI: 10.1016/s0921-4526(01)00881-x

Google Scholar

[6] A. Misiuk: Mater. Phys. Mech. Vol. 1 (2000), p.119.

Google Scholar

[7] E. Oliviero, M.F. Beaufort and J.F. Barbot: J. Appl. Phys. Vol. 89 (2001), p.5332.

Google Scholar

[8] A. Misiuk, H.B. Surma, I.V. Antonova, V.P. Popov, J. Bak-Misiuk, M. Lopez, A. RomanoRodriguez. A. Barcz and J. Jun: Solid State Phen. Vol. 69-70 (1999), p.345.

DOI: 10.4028/www.scientific.net/ssp.69-70.345

Google Scholar

[9] A. Misiuk, J. Bak-Misiuk, A. Barcz, A. Romano-Rodriguez, I.V. Antonova, V.P. Popov, C.A. Londos, J. Jun: Int. J. Hydrogen Energy Vol. 26 (2001), p.483.

DOI: 10.1007/978-94-010-0558-6_43

Google Scholar

[10] J. Bak-Misiuk, I.V. Antonova, A. Misiuk, J. Domagala, V.P. Popov, V.I. Obodnikov, J. Härtwig, A. Romano-Rodriguez, A. Bachrouri: J. Alloys Comp. Vol. 328 (2001), p.181.

DOI: 10.1016/s0925-8388(01)01344-5

Google Scholar

[11] G.F. Cerofolini, G. Calzolari, F. Corni, C. Nobili, G. Ottaviani, R. Tonini: Mater. Sci. Engn. Vol. B71 (2000), p.196.

Google Scholar