Effects of Self-Ion Implantation on the Thermal Growth of He-Induced Cavities in Silicon

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Periodical:

Solid State Phenomena (Volumes 95-96)

Edited by:

H. Richter and M. Kittler

Pages:

337-342

DOI:

10.4028/www.scientific.net/SSP.95-96.337

Citation:

C.L. Liu et al., "Effects of Self-Ion Implantation on the Thermal Growth of He-Induced Cavities in Silicon", Solid State Phenomena, Vols. 95-96, pp. 337-342, 2004

Online since:

September 2003

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$35.00

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