Defects Created by Multi-Energy He Implantation of Silicon at High Temperatures

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Periodical:

Solid State Phenomena (Volumes 95-96)

Edited by:

H. Richter and M. Kittler

Pages:

319-324

DOI:

10.4028/www.scientific.net/SSP.95-96.319

Citation:

M.-L. David et al., "Defects Created by Multi-Energy He Implantation of Silicon at High Temperatures", Solid State Phenomena, Vols. 95-96, pp. 319-324, 2004

Online since:

September 2003

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$35.00

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