Defects Created by Multi-Energy He Implantation of Silicon at High Temperatures

Abstract:

• Periodical: Solid State Phenomena (Volumes 95-96)
• Pages: 319-324
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.95-96.319
• Online since: September 2003
• Authors: Marie-Laure David, Marie France Beaufort, Jean François Barbot
• Keywords: Cavities, Helium, Implantation, Silicon, TEM

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