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HomeSolid State PhenomenaSolid State Phenomena Vols. 95-96Modification of MeV He Implantation-Induced...

Modification of MeV He Implantation-Induced Cavities in Silicon by Hydrogen Plasma Treatment

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Periodical:

Solid State Phenomena (Volumes 95-96)

Pages:

307-312

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.95-96.307

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Online since:

September 2003

Authors:

C.L. Liu, E. Ntsoenzok, Marie France Barthe, P. Desgardin, S. Ashok, A. Vengurlekar, Daniel Alquier, M.O. Ruault

Keywords:

He-Cavities, Hydrogen Plasma Treatment, MeV He Ion Implantation, Silicon, XTEM

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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