Atomically Controlled Technology for Future Si-Based Devices

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Periodical:

Solid State Phenomena (Volumes 95-96)

Edited by:

H. Richter and M. Kittler

Pages:

607-616

DOI:

10.4028/www.scientific.net/SSP.95-96.607

Citation:

J. Murota et al., "Atomically Controlled Technology for Future Si-Based Devices", Solid State Phenomena, Vols. 95-96, pp. 607-616, 2004

Online since:

September 2003

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$35.00

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