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HomeSolid State PhenomenaSolid State Phenomena Vols. 95-96Dopant Segregation on Cavities Induced by Helium...

Dopant Segregation on Cavities Induced by Helium Implantation: Impact of the Doping Level

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Periodical:

Solid State Phenomena (Volumes 95-96)

Pages:

599-606

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.95-96.599

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Online since:

September 2003

Authors:

Frédéric Cayrel, M. Leo Vincent, Daniel Alquier, Fuccio Cristiano, L. Ventura, Christiane Dubois, A. Claverie

Keywords:

Cavity, Dislocation, Doping Level, Gettering, Helium Implantation, Silicon

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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