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HomeSolid State PhenomenaSolid State Phenomena Vols. 95-96Simulations of Iron Re-Dissolution from Oxygen...

Simulations of Iron Re-Dissolution from Oxygen Precipitates in Cz-Silicon and its Impact on Gettering Efficiency

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Periodical:

Solid State Phenomena (Volumes 95-96)

Pages:

581-586

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.95-96.581

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Online since:

September 2003

Authors:

Hele Väinölä, Peng Zhang, Antti Haarahiltunen, Andrei A. Istratov, Eicke R. Weber

Keywords:

Czochralski Silicon, Dissolution, Gettering, Iron, Oxygen Precipitates, Rapid Thermal Processing

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© 2004 Trans Tech Publications Ltd. All Rights Reserved

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[1] M. Aoki and A. Hara: J. Appl. Phys. 74 (1993), p.1440.

[2] P. Zhang, A.A. Istratov, H. Väinölä, and E. R. Weber: this volume (GADEST-2003 conference proceedings).

[3] H. Hieslmair, A.A. Istratov, and E.R. Weber: Semicond. Sci. and Tech. 16 (2001), p.567.

[4] A. A. Istratov, H. Hieslmair, and E. R. Weber: Applied Physics A 69 (1999), p.13.