Simulations of Iron Re-Dissolution from Oxygen Precipitates in Cz-Silicon and its Impact on Gettering Efficiency

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Periodical:

Solid State Phenomena (Volumes 95-96)

Edited by:

H. Richter and M. Kittler

Pages:

581-586

DOI:

10.4028/www.scientific.net/SSP.95-96.581

Citation:

H. Väinölä et al., "Simulations of Iron Re-Dissolution from Oxygen Precipitates in Cz-Silicon and its Impact on Gettering Efficiency", Solid State Phenomena, Vols. 95-96, pp. 581-586, 2004

Online since:

September 2003

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$35.00

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