H.G. Grimmeiss, L. Ask, M. Kleverman, M. Kittler and H. Richter
Online since: August 1999
Description: Ever since the invention of the transistor, a fantastic and continual growth in silicon technology has been witnessed; leading to yet more complex functions and higher densities of devices. The current book summarises the key issues of this field.
Among other topics, the outlook for silicon wafer technology and silicon materials engineering in the next millennium is reviewed and new approaches to the production of a 200 GHz silicon-based devices are described. Possible applications of dislocation luminescence in silicon are discussed as well as the hopes for, and limitations of, the Si:Er - based 1.54 mm emitter. Various properties of silicon-based materials and heterojunctions are characterised by using novel and state-of-the-art measurement techniques. Hydrogen- and oxygen-related defects, rare-earth impurities as well as radiation and gettering effects are discussed from various points of view.
J.H. Werner, H.P. Strunk, H.W. Schock
Online since: April 1999
Description: Like the previous conferences in this series, POLYSE '98 covered many aspects of polycrystalline semiconductors. Whereas earlier proceedings had included many contributions on basic research, for example on the structural properties of single grain boundaries, later proceedings had included more articles on solar cells and thin-film transistors, seemingly marking a transition to a more technology-oriented conference. However, the contributions to POLYSE '98 show that the POLYSE-series is again bringing together researchers from basic research as well as engineers working on devices.
The 84 papers cover topics such as: beam-induced currents, thin-film silicon, silicon crystallization, oxide semiconductor films, chalcogenide and spinel films, chalcopyrite films, thin-film junctions and devices; thus providing an extensive survey of the most recent results in polycrystalline semiconductor research.
Marc Heyns, Marc Meuris and Paul Mertens
Online since: November 1998
Description: The proceedings of the Fourth International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '98) cover all aspects of ultra-clean Si-technology: cleaning, contamination control, Si-surface chemistry and topography, and its relationship to device performance and process yield. New areas of concern include: cleaning at the interconnect level, resist strip and polymer removal (dry and wet), cleaning and contamination aspects of metallization, wafer backside cleaning and cleaning after Chemical-Mechanical-Polishing (CMP).
M. Kittler, O. Breitenstein, A. Endrös, W. Schröter
Online since: December 1998
Description: The 5th International Workshop on Beam Injection Assessment of Defects in Semiconductors (BIADS 98) focussed on many theoretical and experimental aspects of this topic. The aim was to bring together specialists working in the fields of both fundamental research and applications. There were more than 80 participants from 15 countries all over the world.
Milorad Davidovic and Zoran Ikonic
Online since: June 1998
Description: Condensed matter physics is an important field, not only for physicists, but also for other scientists and engineers. It encompasses all types of solid and liquid materials. Solid-state phenomena in metals, semiconductors, dielectrics, magnetic and optical materials in all their forms (crystalline, amorphous, nanocrystalline, polymer, liquid) are being intensely investigated. This is being done both for fundamental reasons, and because of the numerous actual and possible practical applications. Therefore, condensed matter physics is also the keystone of electrical, electronic and mechanical engineering, technology, and the development of its methods thus has a direct influence upon applied sciences.
Nicole Clément and Joël Douin
Online since: January 1998
Description: Dislocations were introduced into crystal physics, and particularly into the theory of plasticity, in 1934. For many years, they were the field of speculation of a small group of specialists, not considered seriously by real physicists and metallurgists. After W.T. Read Jr's fundamental work in 1953 and further developments by Cottrel, Friedel, Frank and Hirsch, dislocations had become part of the working vocabulary of solid-state physics and metallurgy.
C. Claeys, J. Vanhellemont, H. Richter and M. Kittler
Online since: July 1997
Description: Defect control relies more and more upon advanced fabrication approaches such as the use of slow pulling rates and hydrogen annealing. Gettering techniques remain of key importance in enhancing the device yield.
Online since: August 1997
Description: Many important properties of materials are governed by the microstructures which have evolved during their prior treatment. Therefore, the characterisation of structures and the understanding of structural changes has always been a central problem in any discipline which deals with materials.
R.M. Mehra and P.C. Mathur
Online since: August 1997
Description: The subject area of electronic devices has undergone a rapid expansion in recent years. New developments are continually accurring all over the world. Progress in the field of electronic devices is, however, dependent upon the production and characterization of device grade material. The science and technology of electronic materials has attracted somewhat less attention, as compared with device development.
Online since: August 1997
Description: This volume presents the most recent results concerning the various approaches to obtaining light emission from silicon.
This dream of silicon technologists is inspired by the fact that an efficient and stable silicon light emitting device would open the way to the production of monolithic optoelectronic integrated circuits, that were based entirely upon silicon. In fact, some of the main building blocks of optoelectronic devices, such as waveguides and photodetectors have already been developed by using silicon technology. The above possibility would sharply reduce the price of optoelectronic circuits as compared with hybrid ones.