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Semiconductor Wafer Fabrication, Coatings and Tribology
Description:
The special edition includes articles that represented the latest research results and engineering solutions in the synthesis of nanomaterials, analysis processes of semiconductor wafer fabrication, and some decisions on coatings and exploration of tribological performance of several polymer and composite materials. This special edition will be interesting to specialists in nanomaterials synthesis, semiconductor power device production and protective coatings in machinery.
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978-3-0364-0324-3
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Info:
eBook:
ToC:
Editors:
Dr. Juraj Marek, Dr. Gregor Pobegen, Prof. Ulrike Grossner, Hamada Shoukry and Dr. Zhigang Fang
THEMA:
PDT, TGM, TJ
BISAC:
SCI050000, TEC008000, TEC021000
Keywords:
Details:
Special topic volume with invited peer-reviewed papers only
Pages:
156
Year:
2023
ISBN-13 (softcover):
9783036403243
ISBN-13 (eBook):
9783036413242
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Ringgold Subjects:
Materials Science, Electronics, Nanoscience