Gettering anf Defect Engineering in Semiconductor Technology IX
| Paper Title | Page |
|---|---|
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Optical Properties of Oxygen Agglomerates in Silicon Authors: Simona Binetti, Sergio Pizzini, E. Leoni, R. Somaschini, Antonio Castaldini, Anna Cavallini |
75 |
|
Authors: Roberto S. Brusa, W. Deng, Grzegorz P. Karwasz, Antonio Zecca |
81 |
|
Silicon Isotope Shifts of the 648-cm-1 Infrared Absorption Line of Oxygen in Silicon Authors: Hiroshi Yamada-Kaneta |
87 |
|
Thermal Donors in Silicon Implanted with Rare Earth Impurities Authors: Valentin V. Emtsev, C.A.J. Ammerlaan, Boris A. Andreev, Gagik A. Oganesyan, D.S. Poloskin, Elena I. Shek, N.A. Sobolev |
93 |
|
Interfacial Oxygen Thermodonor Formation in Plasma-Hydrogenated Silicon Authors: G.N. Kamaev, V.V. Bolotov, S.A. Chern'aev, M.D. Efremov |
99 |
|
Vibrational Modes of Oxygen Dimers in Germanium Authors: Valentin V. Litvinov, L.I. Murin, J. Lennart Lindström, V.P. Markevich, A.A. Klechko |
105 |
|
Oxygen Precipitation in Silicon Doped with Tin Authors: Lyudmila I. Khirunenko, Yu.V. Pomozov, Mikhail G. Sosnin |
111 |
|
Hydrostatic Pressure Effect on Redistribution of Oxygen Atoms in Oxygen-Implanted Silicon Authors: Andrzej Misiuk, Adam Barcz, Jacek Ratajczak, I.V. Antonova, J. Jun |
115 |
|
Elastic Instability of Strained Spherical Precipitates as a Cause of Oxide Platelets in Silicon Authors: Vladimir V. Voronkov, Robert J. Falster |
121 |
|
Impact of Hydrogen on Oxygen Precipitation and Gate Oxide Integrity after RTA Processing Authors: Timo Müller, G. Obermeier, T. Bearda, A. Huber, R. Schmolke, Wilfried von Ammon, Wilfried Lerch |
127 |
